First cycle
degree courses
Second cycle
degree courses
Single cycle
degree courses
School of Science
Course unit
SC03119798, A.A. 2018/19

Information concerning the students who enrolled in A.Y. 2018/19

Information on the course unit
Degree course First cycle degree in
SC1163, Degree course structure A.Y. 2008/09, A.Y. 2018/19
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Number of ECTS credits allocated 6.0
Type of assessment Mark
Course unit English denomination VACUUM AND THIN FILMS TECHNIQUES
Website of the academic structure
Department of reference Department of Chemical Sciences
E-Learning website
Mandatory attendance No
Language of instruction Italian
Single Course unit The Course unit can be attended under the option Single Course unit attendance
Optional Course unit The Course unit can be chosen as Optional Course unit

Teacher in charge CRISTIAN PIRA

ECTS: details
Type Scientific-Disciplinary Sector Credits allocated
Educational activities in elective or integrative disciplines FIS/03 Material Physics 6.0

Course unit organization
Period First semester
Year 1st Year
Teaching method frontal

Type of hours Credits Teaching
Hours of
Individual study
Laboratory 3.0 36 39.0 No turn
Lecture 3.0 24 51.0 No turn

Start of activities 01/10/2018
End of activities 18/01/2019
Show course schedule 2019/20 Reg.2008 course timetable

Examination board
Board From To Members of the board
4 2019/20 01/10/2019 30/11/2020 AZZOLINI OSCAR (Presidente)
PIRA CRISTIAN (Membro Effettivo)

Prerequisites: Knowledge of Physics I and Physics II; knowledge of electromagnetism and fluid mechanics.
Target skills and knowledge: Once finished the course, the students will know the basis of Vacuum production and measurement and will be able to identify the components of a real vacuum system, using it personally. Students will also acquire knowledges within the field of thin films deposition through practical laboratory activities.
Examination methods: The evaluation exam on the knowledge and expected skills is based on an oral discussion (of about half an hour), in which open questions on the arguments of the course will be submitted.
Assessment criteria: It will be evaluated the comprehension and learning of the treated arguments, concepts and proposed methodologies, together with the ability to apply them autonomously.
Course unit contents: Gas flux through channels: flux regimes; Conductance and Impedance; gas flux in viscous state; gas flux in molecular regime; Conductance of short, long and elbow tubes; Vacuum materials: desorbtion, permeability, solubility, diffusion and degassing; Vacuum System Baking; Vacuum welding and brazing; Vacuum components; electrical, rotary and linear feedthroughs, Vacuuming: rotary pumps; zeolites and traps; piston pumps, membrane pumps, trocoidal pumps, scroll pumps, roots pumps, claw pumps, turbomelocular pumps, diffusion and cryogenic pumps; measuring of a vacuum chamber in low and UHV; Fundamentals of Designing - golden rules and mistakes to avoid ; Vacuum Measurement: Pirani Vacuumeters, Termocouple Vacuumeters, Capacitance Vacuumeters, Penning Vacuumeters, Ionizing Vacuumeters, Bayard Alpert Vacuumeters, Quadrupoles Mass Analyzers; real and virtual Leaks Detectors, Electrotechnics Fundamentals; three-phase and mono phase powering; circuit connections; Relais automatisms and applications to Vacuum Systems; Motors functioning and PVD applications; thin film depositions; Sputtering Fundalmentals; sputtering in DC regime; RF, Biased Deposition for cathodic arc. Films for electroplating, polishing and electropolishing of substrates; Plasma Magnetic Confinement; designing and building of deposition sources; designing of ultra high vacuum for the PVD deposition of thi films; Laboratory on experimental problems on vacuum production.
Planned learning activities and teaching methods: Classroom lectures with the use of powerpoints presentations. Practicals at Legnaro National Laboratories (INFN), in which the main instruments for the production and measurement of vacuum will be used.
Additional notes about suggested reading: Teaching material used in lectures will be available online (website:
Textbooks (and optional supplementary readings)
  • Bruno Ferrario, Introduzione alla tecnologia del vuoto, II edizione. --: Patron, 1999. Cerca nel catalogo
  • Donald M. Mattox, Handbook of physical vapor deposition (PVD) processing, II edition. --: Elsevier, 2010. Cerca nel catalogo

Innovative teaching methods: Teaching and learning strategies
  • Lecturing
  • Laboratory

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