INDUSTRIAL PLASMA TECHNOLOGIES

Second cycle degree in ELECTRICAL ENERGY ENGINEERING

Campus: PADOVA

Language: English

Teaching period: First Semester

Lecturer: PIERGIORGIO SONATO

Number of ECTS credits allocated: 6


Syllabus
Prerequisites: thorough knowledge of electrical science.
Examination methods: Face to face examination based on: presentation and discussion of a in depth-examination of a topic selected by the student and discussion on the laboratory measurements.
Course unit contents: Discharges in the plasma: dark discharge, breakdown, corona discharge, glow discharge, arc, capacitive and inductive discharges.
Fundamnetals of plasma physics, main plasma parameters, interaction between particles, diffusion and mobility, fluid motion of charged particles, Townsend theory on the ionization, Paschen curve.
Plasma diagnostics, electrostatic probes.
Plasma torches: welding and cutting torches, metallurgy and waste treatment torches.
Surface modifications and coatings by plasma, physical vapour deposition, chemical vapour deposition, plasma enhanced vapour deposition, magnetron sputtering, plasma sterilization.
Plasma processes in the semiconductor technology, plasma etchng.
plasma display panels, plasma lighting sysems.
MHD conversion. Spatial propulsion.
Laboratories: vacuum technology, DC discharges: electrical parameters and plasma parameters, magnetron sputtering: Paschen curve measurement, visit to the space propulsion laboratory.